Conclusions

• Bimorph actuator is small and can be fabricated under the mirror

  • Fill factor > 98%

• Bimorph actuators can be tiled in an arrays to actuate large numbers of mirrors

• Bimorph actuator provides large tip deflection (h = 10 mm)

• Models show frequency requirements are met (f>1 kHz)

• Bimorph actuators have been fabricated

  • Testing is underway

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