The Deformable Mirror (DM) is a crucial part of an AO system.
MEMS based DMís are cheaper, faster, and have the potential to have more stroke then conventional DMís.
Boston Micromachines Corporation has a commercially available continuous face-sheet MEMS DM with 2mm of stroke, 7kHz resonance frequency, and an rms surface error of 30nm. 240 V needed to get maximum deflection.
The Airforce mirror designed by William Cowan has a better surface quality, but only 0.65mm of stroke, and it is segmented. 20 V needed to get maximum deflection.
Will continue to work on new high-stroke design based on the Justin Mansellís deformable mirror architecture.